Cascade PM5 Port Probe Station

The PM5 is highly precise probing solution for wafers and substrates up to 150 mm. This probe station is configured for DC device and wafer characterization tests.

Key Features

  • X/Y/Theta Stage
  • Planarity over 150 mm: <10 μm
  • Range of movement 50 mm x 50 mm
  • 1/2 Color CCD Camera/PAL
  • 15'' TFT Monitor With Video in
  • Prohead PH110 Complete Magnetic COAX
  • Probe Tip 2 Mic Tungsten 25 TIPS
  • Probe Travel range 40 mm
  • Probe Contact / Seperation stroke 0.2 mm
  • Probe Repeatability 1 μm
  • Vibration Isolation Platform VIP600
  • SUSS Shield Closure SE750/EMC

SUNUM building, Material Characterization Lab (G155)
For detailed information including Operation Conditions and Service Fees please contact: Onur Serbest: