Micro/Nano Fabrication (Clean Room) Laboratory

Micro/Nano Fabrication (Clean Room) Laboratory

OBJECTIVES AND SPECIFICATIONS

  • Controlled and particle-sterilized clean room area for coating organic and/or inorganic, conductive, insulating, and semiconductive materials using different corrosion methods (wet and dry) for horizontal and vertical configurations from a few nanometers, to hundreds of micrometers
  • Fabrication of structures with dimensions from a few nanometers, to hundreds of micrometers on single or multi-level functional structures.
  • Multi-level and micro- and nano-system analysis and tests

AREAS OF APPLICATONS AND IMPACT

  • Fabrication of micro and nano-system prototypes to be used in a wide field applications such as communications, health, defense, environment, energy
  • Microfluidic circuits for chemical and biological sensor applications (such as chemical and biological sample separator
  • and mixing)
  • Capacitive Sensors Arrays for sensor and Lab-on-a-Chip Applications
  • Chemical Sensor Arrays for flammable, explosive and poisonous elements
  • Fabrication of RF Microelectromechanic Circuit Elements (RFMEMS Key, Filter, Resonator e.g.)
  • Infrared Sensors/Detectors
  • Capacitive, Micro-processed, Ultrasonic Signal Convertor/Sensors
  • Optical Circuit Elements (e.g. Resonators, Reflectors, Filters)
  • Micro and Nano Manipulators
  • Micro and Nano antennas for THz applications
  • Inertial Sensors/Converters/Detectors: Gyroscope, Accelerometer
EQUIPMENT

 

 
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