Nanovak NVTE4-01 Thermal Evaporator

Reservation

Key Features:
• This system is dedicated to Bismuth thin film coating
• Vacuum chamber: 16"x16"x16" stainless steel polished
• Viewing window with a manual shutter
• Automatic pumping/venting control unit
• 11.3 m3/hr scroll pump and 250 L/s turbo pump (~2x10-7 Torr base pressure)
• 4x1.8 kW thermal evaporation sources (10V-180A power supply)
• Sample holder for wafers up to 4" and piece-parts
• Sample rotation
• Sample heating up to 300ºC
• Electronically controlled sample shutter
• Plasma unit for wafer cleaning
• Inficon VGC401 vacuum gauge controller (1000-10-10 Torr)
• Inficon SQM-160 rate/thickness monitor (Quartz crystal sensor):
• Rate resolution: 0.055 Å/s
• Rate display: 0.1 Å/s
• Thickness display: 1 Å

Location:
SUNUM building, Class 1000 Clean Room for Nanofabrication Lab (G131-G145)
For detailed information including Operation Conditions and Service Fees please contact: sunum@sabanciuniv.edu

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