Nanovak NVTE4-01 Thermal Evaporator

Reservation

Dedicated to Bismuth thin film coating

The Nanovak NVTE4-01 is a resistive thermal evaporator for vacuum deposition of thin layers of metals. This compact system is equipped with high-precision thickness/rate monitor and rotating sample holder for depositing high quality, extremely uniform thin films.

Key Features:

  • This system is dedicated to Bismuth thin film coating
  • Vacuum chamber: 16"x16"x16" stainless steel polished
  • Viewing window with a manual shutter
  • Automatic pumping/venting control unit
  • 11.3 m3/hr scroll pump and 250 L/s turbo pump (~2x10-7 Torr base pressure)
  • 4x1.8 kW thermal evaporation sources (10V-180A power supply)
  • Sample holder for wafers up to 4" and piece-parts
  • Sample rotation
  • Sample heating up to 300ºC
  • Electronically controlled sample shutter
  • Plasma unit for wafer cleaning
  • Inficon VGC401 vacuum gauge controller (1000-10-10 Torr)
  • Inficon SQM-160 rate/thickness monitor (Quartz crystal sensor):

Rate resolution: 0.055 Å/s
Rate display: 0.1 Å/s
Thickness display: 1 Å

Location

SUNUM building, Class 1000 Clean Room for Nanofabrication Lab (G131-G145)
For detailed information including Operation Conditions and Service Fees please contact: sunum@sabanciuniv.edu

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