Micro & Nanofabrication Laboratory & Cleanroom


  • Class 100 – Class 10.000 (ISO 5,6,7) clean room for depositing organic and/or inorganic, conductive, insulating, and semi-conductive materials and etching (wet and dry) in controlled dimensions.

  • Fabrication of structures with dimensions from a few nanometers, to hundreds of micrometers on single or multi-level functional structures.

  • Multi-level and micro- and nano-system analyses and tests.


  • Fabrication of micro and nano-device prototypes in a wide field of applications such as communications, health, defense, environment, energy

  • Microfluidic circuits for chemical and biological sensor applications (such as chemical and biological sample separator and mixing)

  • Capacitive sensors arrays for sensor and Lab-on-a-Chip applications

  • Chemical sensor arrays for flammable, explosive and poisonous elements

  • Fabrication of RF microelectromechanic circuit elements (RF-MEMS Key, Filter, Resonator e.g.)

  • Infrared sensors/detectors

  • Capacitive, micro-processed, ultrasonic signal convertor/sensors

  • Optical circuit elements (e.g. Resonators, Reflectors, Filters)

  • Micro / Nano Electromechanical Systems (MEMS/NEMS)

  • Micro / Nano antennas for THz applications

  • Inertial sensors/converters/detectors: Gyroscope, Accelerometer


  • Vistec / Raith EBPG5000plusES 100 kV Electron Beam LithographySystem

  • Torr E-beam and Thermal Evaporator

  • Oxford PlasmaLab System 100 PECVD

  • Oxford PlasmaLab System 100 ICP 300 ICP RIE (III-V and Metal Ething)

  • Oxford PlasmaLab System 100 ICP 300 Deep RIE (SiOX, SiNX and Deep Si Etching)

  • Midas / MDA-60MS Mask Aligner 4”

  • DISCO DAD 320 Automatic Dicing Saw

  • RV 129 Diamond Scriber

  • SSI / Solaris 75-150 Rapid Thermal Annealer

  • Cascade Microtech CP4 4-Point Probe

  • Cascade Microtech PM5 Probe Station

  • Dorutek Electroplating System (Gold and Nickel Electroplating System)

  • Dorutek Lithography Wet Bench x 2 (Spinner, Hot Plate, Rinser)

  • Dorutek Etching Station (Quartz, Teflon Baths, Ultrasonic Bath,QDR) x3

  • Dorutek Wet Bench (Ultrasonic Bath, Bench Top Hot Plate) x1

  • Dorutek Fume Hood x1

  • Vigor Glovebox System

  • NVTS – 400 2 DC – 1 RF Sputter System

  • TPT HB16 Semi – Automatic Thermosonic Wedge & Ball Bonder