User training for the Heidelberg MLA 150 Maskless Aligner system, which was integrated into the SUNUM infrastructure within the scope of the TEAM-NANO project, was held on 11 March 2026. During the training, participants were provided with comprehensive information on photolithography techniques, the basic operating principles of the MLA 150 system, its technical specifications, and the advantages it offers for research processes. With the contribution of experts from Heidelberg, the program also covered fundamental application approaches and the general framework for the effective use of the system.
Offering high-precision maskless lithography, the Heidelberg MLA 150 eliminates the need for photomasks by enabling direct exposure from digital design data, thereby allowing a rapid transition from design to fabrication. The system provides significant advantages particularly for rapid prototyping, multi-layer processes, and micro/nano fabrication applications requiring high precision.
The Heidelberg MLA 150 provides researchers with a flexible and powerful infrastructure through features such as:
- Direct digital exposure based on CAD/GDSII data
- Process capability at approximately 1 µm resolution
- Alignment accuracy of approximately 500 nm
- Compatibility with various substrate sizes ranging from 5 × 5 mm to 6” wafers
- The ability to process a variety of materials such as wafers, glass, and polymers
- Efficient production enabled by short writing times
The system can be used in a wide range of advanced technology applications, including MEMS, photonic structures, microfluidic chips, sensor development, and similar fields.
This workshop was organized within the scope of the Horizon Europe Teaming for Excellence – TEAM-NANO Project, with the aim of enhancing the effective use of SUNUM’s advanced nano-characterization infrastructure, strengthening researchers’ technical competencies, and further improving the center’s internationally competitive research and service capacity.
Funded by the European Union under the Horizon Europe Program, Grant No: 101136388.
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