On Thursday, January 29, 2026, a theoretical and hands-on training session was held for the Spectroscopic Ellipsometry device within the SUNUM infrastructure. The session, open to all current and potential users of the device, was delivered by SUNUM Technical Staff Ali Osman Çetinkaya. During the training, participants had the opportunity to perform trial measurements on their own samples.
Within SUNUM, two spectroscopic ellipsometry systems are available for thin film characterization:
1. J.A. Woollam M2000D
Operating in the wavelength range of 193–1000 nm, this system enables the determination of:
- Film thickness
- Optical constants (refractive index n and extinction coefficient k)
for both single-layer and multilayer thin films, with high accuracy and rapid spectral data acquisition. It is widely used in studies involving semiconductor, dielectric, and functional coating materials.
2. J.A. Woollam VASE (Variable Angle Spectroscopic Ellipsometer)
With a broad spectral measurement capability of 193–1700 nm, the VASE system provides high sensitivity in optical modeling thanks to its variable-angle feature. In addition to ellipsometric thin film thickness and optical constant (n, k) analysis, the system also enables:
- Intensity Reflectance measurements
- Intensity Transmittance measurements
- Transmission ellipsometry measurements
making it particularly suitable for comprehensive characterization of optical coatings, transparent conductive films, and photonic structures.
Together, these two systems offer a powerful thin film analysis infrastructure for both research and industrial applications, thanks to their wide spectral coverage and multi-measurement capabilities.
For our Fabrication/Test/Analysis Services List: https://sunum.sabanciuniv.edu/en/infrasturcture/service-fees
For detailed information and reservation sunum-services@sabanciuniv.edu
